Research Article

Mechanical and Structural Properties of Fluorine-Ion-Implanted Boron Suboxide

Figure 9

AFM images showing what could possibly be clusters of nanoparticles embedded in the samples synthesized by fluorine-ion-beam implantation, (a) unimplanted specimen A, and ((b)–(d)) fluorine-implanted specimens C, D, and G.
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(a) Specimen A
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(b) Specimen C
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(c) Specimen D
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(d) Specimen G