Mechanical and Structural Properties of Fluorine-Ion-Implanted Boron Suboxide

Table 2

A summary of the effect of ion implantation on 𝐻(𝐸), 𝐸, the ratio 𝐻/𝐸, and the Meyer’s index 𝑛.

Specimen	𝐻(𝐸)	𝐸	𝐻/𝐸	𝑛
	GPa	GPa
A	31.0	328.0	0.093	1.66
C	29.0	359.0	0.082	1.92
D	23.0	300.0	0.076	1.94
G	21.0	292.0	0.073	1.96