Table 1: Properties of MFC Type P1 M2814.

Operational voltage−500 V~1500 V
Active dimensions28 mm × 14 mm
Overall dimension38 mm × 20 mm
Capacitance0.61 ppm
Free strain1550 ppm
Thickness300 μm
Actuator bandwidth0 Hz~700 KHz
Sensor bandwidth0 Hz~1 MHz