Properties and Analysis of Transparency Conducting AZO Films by Using DC Power and RF Power Simultaneous Magnetron Sputtering

<table>The thickness and the crystalline size for the sputtered AZO films versus (a) the incident RF power and (b) the substrate temperature. </table>

Advances in Materials Science and Engineering

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Figure 2

Figure 2: Properties and Analysis of Transparency Conducting AZO Films by Using DC Power and RF Power Simultaneous Magnetron Sputtering 