The Effect of Deposition Rate on Morphology and Structural Properties of Carbon-Nickel Composite Films

Table 1

Details of AFM analysis of C-Ni composite films.

Deposition; time (sec)	Thickness; (nm)	Mean height; (nm)	RMS; (nm)	Deposition; rate; (nm/sec)
50	42	9	3.5	0.84
90	150	13	4.9	1.6
180	309	20	5	1.71
600	608	16	4	1