The Effect of Annealing on the Structural and Optical Properties of Titanium Dioxide Films Deposited by Electron Beam Assisted PVD

<table>EDS spectrum of sample TAD on the top surface of the sample. The identified peaks are labeled according to atomic species and show the strongest peaks belonging to titanium and oxygen.</table>

Advances in Materials Science and Engineering

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Figure 5

Figure 5: The Effect of Annealing on the Structural and Optical Properties of Titanium Dioxide Films Deposited by Electron Beam Assisted PVD 