The Effect of Annealing on the Structural and Optical Properties of Titanium Dioxide Films Deposited by Electron Beam Assisted PVD

Table 2

Atomic percentages of Ti2p and O1s obtained from XPS spectra along with the atomic ratio of oxygen to titanium in the TiO_2−𝑥 structure.

Sample	Ti2p^3/2atomic %	O1s(a) atomic %	O1s(a): Ti2p^3/2 ratio
TAD	11.1	32.4	2.92
T500	17.91	29.41	1.64
T600	16.69	25.09	1.50
T700	14.38	21.73	1.51
T800	10.51	19.04	1.81