A Humidity Sensor Based on Silver Nanoparticles Thin Film Prepared by Electrostatic Spray Deposition Process

Table 1

Structural parameters (crystalline size, dislocation density, and lattice microstrain) of the Ag NPs film deposited at different deposition times.

Deposition time	𝐷 (nm)	𝛿 (10^14 lin m^−2)	𝜀 (10^−3 lin^−2 m^−2)
5 min	14.8	45.1	1.89
10 min	16.5	36.3	1.71
20 min	17.1	34.2	1.65