857196.fig.001a
(a) Yuge et al. (1994) [7].
857196.fig.001b
(b) Kato et al. (2000) [8].
857196.fig.001c
(c) Morita and Miki (2003) [9].
857196.fig.001d
(d) Desired innovative process.
Figure 1: Proposed refining processes to purify MG-Si to SoG-Si.