Improving Barrier Properties of PET by Depositing a Layer of DLC Films on Surface

Table 1

Deposition process parameters.

Sample	Ar : C2H2	RF Power (W)	Time (s)	Gas flow rate (sccm)
1	1 : 1	600	30	30
2	1 : 2	600	30	30
3	2 : 1	600	30	30
4	3 : 1	600	30	30
5	1 : 2	600	10	30
6	1 : 2	600	20	30
7	1 : 2	600	60	30
8	1 : 2	300	30	30
9	1 : 2	900	30	30
10	1 : 2	1200	30	30
11*	—	—	—	—

∗Blank sample.