Table 2: ratios under different process conditions.

Ar : C2H2RF power (W)Time (s)Gas flow rate
(sccm)
Oxygen permeability
(cm3/m2 · 24 h · 0.1 MPa)
Water vapor permeability
(g/m2 · 24 h)
ratio

1 : 2600303012.164.010.76
1 : 2900303018.767.690.79
1 : 2600203027.8911.030.89
2 : 1600303032.7813.731.04
3 : 1600303046.9121.251.25