Table 3: Barrier properties under different deposition process.

SampleAr : C2H2RF power (W)Time (s)Gas flow rate
(sccm)
Oxygen permeability
(cm3/m2 · 24h · 0.1 MPa)
Water vapor permeability
(g/m2 · 24 h)

11 : 1600303022.4111.56
21 : 2600303012.164.01
32 : 1600303032.7813.73
43 : 1600303046.9121.25
51 : 2600103043.9116.07
61 : 2600203027.8911.03
71 : 2600603019.018.15
81 : 2300303024.379.16
91 : 2900303018.767.69
101 : 21200303026.1214.57
11*135.9848.76

Blank sample.