Characterization of Metal Oxide-Based Gas Nanosensors and Microsensors Fabricated via Local Anodic Oxidation Using Atomic Force Microscopy
Figure 1
(Color online) Topographic AFM images of different nanosensors and microsensors fabricated via LAO routes. (a) A rounded-shaped Mo oxide region (light brown) is formed in the Mo track. (b) Image showing several consecutive oxide lines forming a micron-sized active region of the Mo oxide sensor. (c) Micron-sized single line sensor active region of Mo oxide. (d) A microsensor rounded-shaped Mo oxide region is formed in the center of the Mo track. (e) Image showing two consecutive active regions of a Ti oxide (yellow) nanosensor separated by several hundreds of nanometers. (f) Microsensor Ti oxide produced with the AFM tip at rest. (g) Image of a Ti oxide microsensor fabricated via three consecutive oxidation spots. (h) Nanowire-type Ti oxide region is formed in a Ti track.
