Characterization of Metal Oxide-Based Gas Nanosensors and Microsensors Fabricated via Local Anodic Oxidation Using Atomic Force Microscopy

Figure 10

Normalized current sensing response of the MoO₃ microsensor to 8% of CO₂ under different temperatures (329°C—open circles; 284°C—crosses; and 237°C—continuous line) (a) and to 1.7% of H₂ under different temperatures (237°C—open circles; 191°C—crosses and; and 145°C—continuous line) (b) test gases in a commercial N₂ (dry air).

(a)

(b)