Characterization of Metal Oxide-Based Gas Nanosensors and Microsensors Fabricated via Local Anodic Oxidation Using Atomic Force Microscopy
Figure 6
Normalized current sensing response of the Ti nanosensor to test gases in dry air. (a) and (b) show, respectively, tests to three consecutive pulses of 1.7% of H2 and 8% CO2, at three different temperatures (190°C—open circles, 215°C—crosses, and 237°C—continuous line). The sensing response (open circles) to ppm concentration (continuous line) of H2, and CO2 test gases at working temperature of 220°C are also shown in (c) and (d), respectively.
