New Measurement Method and Uncertainty Estimation for Plate Dimensions and Surface Quality

Table 6

Estimation of uncertainty budget in point deviation for tiles measurements.

Test specimen	Sources of uncertainty	St. uncertainty, 𝑈(𝑋𝑖)			Assumed distribution	Combined uncertainty, 𝑢(𝑋𝑖)			𝐶
		Δ𝐶, µm	Δ𝑆, µm	Δ𝑊, µm		Δ𝐶, µm	Δ𝑆, µm	Δ𝑊, µm
First	Repeatability	0.3	0.5	0.3	Normal	0.15	0.25	0.15	1
	Resolution	0.05			Rectangular	0.029			1
	MPE	0.9 + (𝐿/350)			Normal (based on 𝑘=3)	0.30			1
	MPE𝑃	0.5			Rectangular	0.29			1
	Combined standards uncertainty, 𝑢𝑐=±0.49 µm
	Expanded uncertainty 𝑈exp=±0.98 µm
Second	Repeatability	1.9	2.0	3.1	Normal	0.95	1.0	1.55	1
	Resolution	0.05			Rectangular	0.029			1
	MPE	0.9 + (𝐿/350)			Normal (based on 𝑘=3)	0.30			1
	MPE𝑃	0.5			Rectangular	0.29			1
	Combined standards uncertainty, 𝑢𝑐=±1.6 µm
	Expanded uncertainty 𝑈exp=±3.20 µm
Third	Repeatability	1.7	2.4	3.8	Normal	0.85	1.20	1.90	1
	Resolution	0.05			Rectangular	0.029			1
	MPE	0.9 + (𝐿/350)			Normal (based on 𝑘=3)	0.30			1
	MPE𝑃	0.5			Rectangular	0.29			1
	Combined standards uncertainty, 𝑢𝑐=±1.9 µm
	Expanded uncertainty 𝑈exp=±3.80 µm

𝐶 is the sensitivity of measurements.