Advances in Materials Science and Engineering

Research Article

Crack Detection in Single-Crystalline Silicon Wafer Using Laser Generated Lamb Wave

Table 1

Wave velocities in single-crystalline silicon wafer.
OrientationLongitudinal wave velocityShear wave velocity
8436 (m/s)5847 (m/s)
9138 (m/s)4675 (m/s)
9360 (m/s)5096 (m/s)