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</svg> Film Deposited by Radio-Frequency Sputtering Using a ZnO-Mg Composite Target

<table>Spectral responsivities of the Mg<sub>0.52</sub>Zn<sub>0.48</sub>O UV-PD at different bias voltages.</table>

Advances in Materials Science and Engineering

fig6

Figure 6

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</svg> Film Deposited by Radio-Frequency Sputtering Using a ZnO-Mg Composite Target 

Figure 6 | Narrowband, Visible-Blind UV-A Sensor Based on a 
	
		
			

			

			

			

			

		
	
 Film Deposited by Radio-Frequency Sputtering Using a ZnO-Mg Composite Target 

Advances in Materials Science and Engineering

Narrowband, Visible-Blind UV-A Sensor Based on a Film Deposited by Radio-Frequency Sputtering Using a ZnO-Mg Composite Target

Figure 6