Narrowband, Visible-Blind UV-A Sensor Based on a <svg     style="vertical-align:-5.4198pt;width:128.89999px;" id="M1" height="22" version="1.1" viewBox="0 0 128.89999 22" width="128.89999"  xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg">
	
		
			<g transform="matrix(.022,-0,0,-.022,.062,15.187)"><path id="x4D" d="M861 0h-263v28q61 5 73 22t12 97l-4 408h-4l-244 -548h-20l-224 534h-2l-15 -285q-5 -98 -3 -166q1 -34 19.5 -45t72.5 -17v-28h-233v28q45 5 62.5 17t22.5 43q11 65 19 183l14 208q3 36 3.5 55t-2.5 37.5t-6.5 25t-16.5 13t-25.5 8t-39.5 4.5v28h164l228 -501l232 501
h170v-28q-68 -6 -81 -21.5t-11 -91.5l9 -362q2 -80 15 -97t78 -22v-28z" /></g><g transform="matrix(.022,-0,0,-.022,20.035,15.187)"><path id="x67" d="M463 437l5 -8q-21 -38 -45 -51l-57 3q30 -35 30 -88q0 -76 -52.5 -118t-122.5 -42q-24 0 -51 5q-30 -21 -30 -42q0 -16 16 -27t47 -11q19 0 54 0.5t52 0.5q36 0 65.5 -8t53.5 -36t24 -74q0 -77 -75 -137.5t-174 -60.5q-79 0 -126 37.5t-48 84.5q0 32 24 56q21 21 83 70
q-49 15 -74 55q-13 20 -11 42q56 21 88 61q-37 16 -62.5 51t-25.5 83q0 78 56.5 122t122.5 44h1q51 0 96 -27q71 4 136 15zM219 418q-34 0 -58 -32t-24 -87q0 -59 26.5 -96.5t67.5 -37.5q35 1 59 32t24 87q0 59 -26 96.5t-69 37.5zM241 -11q-62 0 -87 -21q-46 -39 -46 -78
q0 -41 38 -68.5t94 -27.5q69 0 106.5 31t37.5 80q0 52 -45 71q-33 13 -98 13z" /></g>

			<g transform="matrix(.016,-0,0,-.016,30.525,21.737)"><path id="x1D7CE" d="M476 337q0 -157 -63 -254q-63 -96 -162 -96t-163 96q-64 95 -64 251q0 51 7 99.5t24.5 95.5t43 81.5t65.5 56t89 21.5q75 0 127 -55q96 -97 96 -296zM318 224v225q0 111 -16 161t-53 50t-52 -48.5t-15 -162.5v-225q0 -112 16 -160.5t53 -48.5t52 47.5t15 161.5z" /></g><g transform="matrix(.016,-0,0,-.016,38.371,21.737)"><path id="x2E" d="M113 -12q-24 0 -39.5 16t-15.5 42q0 24 16 40.5t40 16.5t40 -16.5t16 -40.5q0 -26 -16 -42t-41 -16z" /></g><g transform="matrix(.016,-0,0,-.016,41.948,21.737)"><path id="x1D7D3" d="M148 676h322l-45 -127h-276l-22 -81q103 -6 151 -20q82 -23 127.5 -79.5t45.5 -134.5q0 -109 -79 -176q-78 -66 -203 -66q-64 0 -105.5 25.5t-41.5 62.5q0 26 17.5 43.5t43.5 17.5q47 0 100 -46q49 -42 90 -42q42 0 71 29.5t29 74.5q0 51 -36.5 90.5t-105.5 61.5
q-47 14 -180 22z" /></g><g transform="matrix(.016,-0,0,-.016,49.794,21.737)"><path id="x1D7D0" d="M453 211h25l-46 -211h-415v23q97 102 151 166q42 49 81 110q51 78 51 148q0 56 -31.5 91.5t-87.5 35.5q-77 0 -122 -90h-28q67 204 223 204q82 0 132 -49.5t50 -133.5q0 -110 -114 -218l-162 -154h140q82 0 107 13q27 13 46 65z" /></g>

			<g transform="matrix(.022,-0,0,-.022,58.262,15.187)"><path id="x5A" d="M561 176l29 -6q-25 -130 -36 -170h-517l-8 15l420 599h-173q-77 0 -102 -7t-39 -29q-19 -29 -35 -87l-29 1q9 111 12 183h24q9 -16 19 -20.5t34 -4.5h399l7 -14l-413 -594q48 -6 163 -6q94 0 131.5 7.5t58.5 29.5q28 29 55 103z" /></g><g transform="matrix(.022,-0,0,-.022,72.071,15.187)"><path id="x6E" d="M524 0h-209v26q44 5 55 18t11 65v167q0 114 -91 114q-50 0 -109 -51v-235q0 -50 10 -61.5t55 -16.5v-26h-217v26q51 5 62 17t11 61v206q0 47 -9.5 58.5t-50.5 19.5v23q82 15 139 40v-79l67 47q47 30 83 30q60 0 94.5 -40t34.5 -112v-193q0 -50 10 -61.5t54 -16.5v-26z
" /></g>

			<g transform="matrix(.016,-0,0,-.016,84.35,20.575)"><use xlink:href="#x1D7CE"/></g><g transform="matrix(.016,-0,0,-.016,92.196,20.575)"><use xlink:href="#x2E"/></g><g transform="matrix(.016,-0,0,-.016,95.773,20.575)"><path id="x1D7D2" d="M476 255v-111h-64v-144h-145v144h-248v113l313 431h80v-433h64zM60 255h208v294z" /></g><g transform="matrix(.016,-0,0,-.016,103.619,20.575)"><path id="x1D7D6" d="M472 187q0 -91 -62.5 -145.5t-169.5 -54.5q-97 0 -154.5 46t-57.5 124q0 132 149 168q-74 44 -106 87.5t-32 100.5q0 80 60.5 127.5t163.5 47.5q89 0 142 -40.5t53 -104.5q0 -98 -136 -140q84 -57 117 -105t33 -111zM339 537q0 54 -23.5 88t-64.5 34q-35 0 -59 -24
t-24 -59q0 -87 130 -154q25 33 33 56t8 59zM333 127q0 54 -26 89q-26 36 -107 90q-51 -75 -51 -145q0 -68 24 -105t69 -37q42 0 66.5 28.5t24.5 79.5z" /></g>

			<g transform="matrix(.022,-0,0,-.022,112.088,15.187)"><path id="x4F" d="M381 665q131 0 226.5 -93t95.5 -239q0 -158 -96 -253t-238 -95q-137 0 -231 95t-94 238q0 142 92.5 244.5t244.5 102.5zM359 629q-89 0 -151 -74.5t-62 -208.5q0 -141 69 -233t175 -92q90 0 150.5 74t60.5 211q0 152 -69 237.5t-173 85.5z" /></g>

		
	
</svg> Film Deposited by Radio-Frequency Sputtering Using a ZnO-Mg Composite Target

<table>Peak responsivity versus bias voltage of the Mg<sub>0.52</sub>Zn<sub>0.48</sub>O UV-PD.</table>

Advances in Materials Science and Engineering

fig7

Figure 7

Figure 7: Narrowband, Visible-Blind UV-A Sensor Based on a <svg     style="vertical-align:-5.4198pt;width:128.89999px;" id="M1" height="22" version="1.1" viewBox="0 0 128.89999 22" width="128.89999"  xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg">
	
		
			<g transform="matrix(.022,-0,0,-.022,.062,15.187)"><path id="x4D" d="M861 0h-263v28q61 5 73 22t12 97l-4 408h-4l-244 -548h-20l-224 534h-2l-15 -285q-5 -98 -3 -166q1 -34 19.5 -45t72.5 -17v-28h-233v28q45 5 62.5 17t22.5 43q11 65 19 183l14 208q3 36 3.5 55t-2.5 37.5t-6.5 25t-16.5 13t-25.5 8t-39.5 4.5v28h164l228 -501l232 501
h170v-28q-68 -6 -81 -21.5t-11 -91.5l9 -362q2 -80 15 -97t78 -22v-28z" /></g><g transform="matrix(.022,-0,0,-.022,20.035,15.187)"><path id="x67" d="M463 437l5 -8q-21 -38 -45 -51l-57 3q30 -35 30 -88q0 -76 -52.5 -118t-122.5 -42q-24 0 -51 5q-30 -21 -30 -42q0 -16 16 -27t47 -11q19 0 54 0.5t52 0.5q36 0 65.5 -8t53.5 -36t24 -74q0 -77 -75 -137.5t-174 -60.5q-79 0 -126 37.5t-48 84.5q0 32 24 56q21 21 83 70
q-49 15 -74 55q-13 20 -11 42q56 21 88 61q-37 16 -62.5 51t-25.5 83q0 78 56.5 122t122.5 44h1q51 0 96 -27q71 4 136 15zM219 418q-34 0 -58 -32t-24 -87q0 -59 26.5 -96.5t67.5 -37.5q35 1 59 32t24 87q0 59 -26 96.5t-69 37.5zM241 -11q-62 0 -87 -21q-46 -39 -46 -78
q0 -41 38 -68.5t94 -27.5q69 0 106.5 31t37.5 80q0 52 -45 71q-33 13 -98 13z" /></g>

			<g transform="matrix(.016,-0,0,-.016,30.525,21.737)"><path id="x1D7CE" d="M476 337q0 -157 -63 -254q-63 -96 -162 -96t-163 96q-64 95 -64 251q0 51 7 99.5t24.5 95.5t43 81.5t65.5 56t89 21.5q75 0 127 -55q96 -97 96 -296zM318 224v225q0 111 -16 161t-53 50t-52 -48.5t-15 -162.5v-225q0 -112 16 -160.5t53 -48.5t52 47.5t15 161.5z" /></g><g transform="matrix(.016,-0,0,-.016,38.371,21.737)"><path id="x2E" d="M113 -12q-24 0 -39.5 16t-15.5 42q0 24 16 40.5t40 16.5t40 -16.5t16 -40.5q0 -26 -16 -42t-41 -16z" /></g><g transform="matrix(.016,-0,0,-.016,41.948,21.737)"><path id="x1D7D3" d="M148 676h322l-45 -127h-276l-22 -81q103 -6 151 -20q82 -23 127.5 -79.5t45.5 -134.5q0 -109 -79 -176q-78 -66 -203 -66q-64 0 -105.5 25.5t-41.5 62.5q0 26 17.5 43.5t43.5 17.5q47 0 100 -46q49 -42 90 -42q42 0 71 29.5t29 74.5q0 51 -36.5 90.5t-105.5 61.5
q-47 14 -180 22z" /></g><g transform="matrix(.016,-0,0,-.016,49.794,21.737)"><path id="x1D7D0" d="M453 211h25l-46 -211h-415v23q97 102 151 166q42 49 81 110q51 78 51 148q0 56 -31.5 91.5t-87.5 35.5q-77 0 -122 -90h-28q67 204 223 204q82 0 132 -49.5t50 -133.5q0 -110 -114 -218l-162 -154h140q82 0 107 13q27 13 46 65z" /></g>

			<g transform="matrix(.022,-0,0,-.022,58.262,15.187)"><path id="x5A" d="M561 176l29 -6q-25 -130 -36 -170h-517l-8 15l420 599h-173q-77 0 -102 -7t-39 -29q-19 -29 -35 -87l-29 1q9 111 12 183h24q9 -16 19 -20.5t34 -4.5h399l7 -14l-413 -594q48 -6 163 -6q94 0 131.5 7.5t58.5 29.5q28 29 55 103z" /></g><g transform="matrix(.022,-0,0,-.022,72.071,15.187)"><path id="x6E" d="M524 0h-209v26q44 5 55 18t11 65v167q0 114 -91 114q-50 0 -109 -51v-235q0 -50 10 -61.5t55 -16.5v-26h-217v26q51 5 62 17t11 61v206q0 47 -9.5 58.5t-50.5 19.5v23q82 15 139 40v-79l67 47q47 30 83 30q60 0 94.5 -40t34.5 -112v-193q0 -50 10 -61.5t54 -16.5v-26z
" /></g>

			<g transform="matrix(.016,-0,0,-.016,84.35,20.575)"><use xlink:href="#x1D7CE"/></g><g transform="matrix(.016,-0,0,-.016,92.196,20.575)"><use xlink:href="#x2E"/></g><g transform="matrix(.016,-0,0,-.016,95.773,20.575)"><path id="x1D7D2" d="M476 255v-111h-64v-144h-145v144h-248v113l313 431h80v-433h64zM60 255h208v294z" /></g><g transform="matrix(.016,-0,0,-.016,103.619,20.575)"><path id="x1D7D6" d="M472 187q0 -91 -62.5 -145.5t-169.5 -54.5q-97 0 -154.5 46t-57.5 124q0 132 149 168q-74 44 -106 87.5t-32 100.5q0 80 60.5 127.5t163.5 47.5q89 0 142 -40.5t53 -104.5q0 -98 -136 -140q84 -57 117 -105t33 -111zM339 537q0 54 -23.5 88t-64.5 34q-35 0 -59 -24
t-24 -59q0 -87 130 -154q25 33 33 56t8 59zM333 127q0 54 -26 89q-26 36 -107 90q-51 -75 -51 -145q0 -68 24 -105t69 -37q42 0 66.5 28.5t24.5 79.5z" /></g>

			<g transform="matrix(.022,-0,0,-.022,112.088,15.187)"><path id="x4F" d="M381 665q131 0 226.5 -93t95.5 -239q0 -158 -96 -253t-238 -95q-137 0 -231 95t-94 238q0 142 92.5 244.5t244.5 102.5zM359 629q-89 0 -151 -74.5t-62 -208.5q0 -141 69 -233t175 -92q90 0 150.5 74t60.5 211q0 152 -69 237.5t-173 85.5z" /></g>

		
	
</svg> Film Deposited by Radio-Frequency Sputtering Using a ZnO-Mg Composite Target 

Figure 7 | Narrowband, Visible-Blind UV-A Sensor Based on a 
	
		
			

			

			

			

			

		
	
 Film Deposited by Radio-Frequency Sputtering Using a ZnO-Mg Composite Target 

Advances in Materials Science and Engineering

Narrowband, Visible-Blind UV-A Sensor Based on a Film Deposited by Radio-Frequency Sputtering Using a ZnO-Mg Composite Target

Figure 7