Optimization of the Cathode Arc Plasma Deposition Processing Parameters of ZnO Film Using the Grey-Relational Taguchi Method

Table 4

Grey-relational grade and S/N ratio.

Experiment number	Control factors			Grey-relational grade	S/N (dB)
	A	B	C
1	1	1	1	0.6589	−3.62
2	2	2	2	0.4440	−7.05
3	3	3	3	0.6667	−3.52
4	1	2	3	0.3452	−9.24
5	2	3	1	0.3720	−8.59
6	3	1	2	0.5083	−5.88
7	1	3	2	0.3832	−8.33
8	2	1	3	0.4876	−6.24
9	3	2	1	0.7137	−2.93