Optimization of the Cathode Arc Plasma Deposition Processing Parameters of ZnO Film Using the Grey-Relational Taguchi Method

Table 5

S/N response for grey-relational grade.

Parameters	Mean S/N ratio (dB)			Optimal parameters
	Level 1	Level 2	Level 3
A: gas flow ratio (Ar : O2)	−7.06	−7.29	−4.11	A3
B: arc current	−5.25	−6.41	−6.81	B1
C: deposition time	−5.05	−7.09	−6.33	C1