Optimization of the Cathode Arc Plasma Deposition Processing Parameters of ZnO Film Using the Grey-Relational Taguchi Method

Table 7

ANOVA results of grey-relational grade for ZnO thin films.

Parameters	Degree of freedom (F)	Sum of square (S)	Variance (V)	Contribution (%)
A: gas flow ratio (Ar : O2)	2	18.92	9.46	65
B: arc current	2	3.97	1.99	13
C: deposition time	2	6.38	3.19	22
Total		29.27		100