Growth and Device Performance of AlGaN/GaN Heterostructure with AlSiC Precoverage on Silicon Substrate

<table>A schematic cross-sectional view and TEM image of the fabricated MESFET layer structure.</table>

Advances in Materials Science and Engineering

Figure 1: Growth and Device Performance of AlGaN/GaN Heterostructure with AlSiC Precoverage on Silicon Substrate 