Research Article

Development of Pd Alloy Hydrogen Separation Membranes with Dense/Porous Hybrid Structure for High Hydrogen Perm-Selectivity

Figure 2

Process and mechanism for the formation of 3D widely open structure: (a) micropolishing process for pore-free and flat surface of the support (SEM images); (b) advanced sputtering process for uniformly fine films (SEM/TEM images); (c) heat treatment process for alloying, crystallization, and the formation of a dense/porous hybrid structure (SEM/XRD/EDS profile); (d) Pd-Ni alloy phase diagram.