Research Article

Development of Pd Alloy Hydrogen Separation Membranes with Dense/Porous Hybrid Structure for High Hydrogen Perm-Selectivity

Figure 4

The cross-sectional FE-SEM images and composition profiles of the heat-treated Pd-Cu alloy films with 4 μm thickness for various interface structures depending on the sputter as-deposited microstructures: (a), (d) closed interface; (b), (e) partially open interface; (c), (f) open interface; arrow lines in (a), (b), and (c) are EDS detection range.