Research Article
Characteristics of Bilayer Molybdenum Films Deposited Using RF Sputtering for Back Contact of Thin Film Solar Cells
Table 1
Physical characteristics of Mo films prepared under different deposition conditions.
| | RF (W) | Ar (sccm) | W.P. (mTorr) | Sputtering time (min) | Resistivity (Ω·cm) | Mobility (cm2/Vs) | Adhesion (pass/fail) | Reflectivity (%) |
| | 30 | 30 | 12 | 20 | 5.41 × 10−4 | — | Pass | — | | 30 | 30 | 4.5 | 20 | 2.13 × 10−4 | 0.36 | Fail | — | | 50 | 30 | 4.5 | 20 | 9.29 × 10−5 | 1.10 | Fail | 51.09 | | 100 | 30 | 4.5 | 20 | 6.10 × 10−5 | 4.55 | Fail | — | | 150 | 30 | 4.5 | 20 | 7.35 × 10−5 | 9.89 | Fail | — | | 100 | 30 | 4.5 | 20 | 6.10 × 10−5 | 4.09 | Fail | 52.74 | | 100 | 30 | 8 | 20 | 2.34 × 10−4 | 1.80 | Pass | — | | 100 | 30 | 12 | 20 | 3.66 × 10−4 | 0.86 | Pass | — | | 30/100 | 30 | 12/4.5 | 10/20 | 6.35 × 10−5 | 4.53 | Pass | 52.63 |
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