Mechanical Properties and Thermal Stability of TiN/Ta Multilayer Film Deposited by Ion Beam Assisted Deposition

<table>Auger electron spectroscopy depth profile of Ti, N, and Ta elements in the TiN/Ta multilayer film.</table>

Advances in Materials Science and Engineering

Figure 4: Mechanical Properties and Thermal Stability of TiN/Ta Multilayer Film Deposited by Ion Beam Assisted Deposition 