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Advances in Materials Science and Engineering
Volume 2014 (2014), Article ID 691967, 8 pages
http://dx.doi.org/10.1155/2014/691967
Research Article

Synthesis and Characterization of SiO2 Nanoparticles and Their Efficacy in Chemical Mechanical Polishing Steel Substrate

1Department of Vehicle Engineering, National Taipei University of Technology, 1, Sec. 3, Chung-Hsiao E. Road, Taipei 10643, Taiwan
2Graduate Institute of Mechanical and Electrical Engineering, National Taipei University of Technology, 1, Sec. 3, Chung-Hsiao E. Road, Taipei 10643, Taiwan
3Department of Vehicle Engineering, Army Academy, 750 Longdong Road, Taoyuan 32092, Taiwan

Received 12 September 2013; Revised 9 February 2014; Accepted 23 February 2014; Published 27 March 2014

Academic Editor: Ho Chang

Copyright © 2014 M. J. Kao et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

M. J. Kao, F. C. Hsu, and D. X. Peng, “Synthesis and Characterization of SiO2 Nanoparticles and Their Efficacy in Chemical Mechanical Polishing Steel Substrate,” Advances in Materials Science and Engineering, vol. 2014, Article ID 691967, 8 pages, 2014. doi:10.1155/2014/691967