Fabrication of Ni-Mn Microprobe Structure with Low Internal Stress and High Hardness by Employing DC Electrodeposition

Table 1

Compositions of electrolyte and the associated process parameters.

Ingredient	Concentration (g/L)
Nickel sulphamate	514 mL/L (Ni^2+: 90 g/L)
MnSO4·5H2O	0~175.5 (Mn^2+: 0~40 g/L)
NiCl2·6H2O	3
H3BO3	40
Wetting agent; (sodium dodecyl sulfonate)	1.8 mL/L
Process parameters
Temperature	50°C
Current density	0.2–12 A/dm^2
Agitation	Magnetic stirrer, 200 rpm