Intermetallic Phase on the Interface of Ag-Au-Pd/Al Structure

Table 1

EDS of the three layers of IMC (wt.%).

	Al	Ag	Au	Pd
H phase	60.50%	22.80%	10.89%	5.81%
Upper IMC	43.07%	44.02%	8.25%	4.66%
Lower IMC	37.26%	62.74%