Table 1: Anisotropy factor depending on the etching parameters (pressure and power). Symbols in brackets belong to Figure 6.

50 mTorr 70 mTorr 90 mTorr

90 W 0.58 (○) 0.55 (□) 0.43 ( )
120 W 0.61 (△) 0.53 ( )
150 W 0.65 ( ) 0.51 ( )