Research Article
The Study of Microwave and Electric Hybrid Sintering Process of AZO Target
Figure 12
Photographs of AZO targets after sintering with different change rates of microwave power.
| (a) 5 min |
| (b) 10 min |
| (c) 15 min |
| (d) 20 min |
| (a) 5 min |
| (b) 10 min |
| (c) 15 min |
| (d) 20 min |