The Study of Microwave and Electric Hybrid Sintering Process of AZO Target

<div>Microstructures of AZO targets sintered at different microwave starting temperatures: (a) 1000, (b) 1100, (c) 1200, and (d) 1300°C.</div>

Advances in Materials Science and Engineering

Figure 7: The Study of Microwave and Electric Hybrid Sintering Process of AZO Target 