Research Article
The Study of Microwave and Electric Hybrid Sintering Process of AZO Target
Table 1
Relevant parameters of ZnO and Al2O3.
| | | Al2O3 | ZnO |
| | (a.u.) | | See details in Figure 2 |
| | (g/cm3) | 0.24 | = 0.52 (for ≤ 600°C)
= (for 600°C < ≤ 1150°C)
(for 0°C) |
| | (J/(g·K)) | 1.09 | |
| | (W/(m2·°C)) | for ≤ 500°C
for > 500°C | Low temperature stage:
High temperature stage:
°C: |
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