Research Article
The Study of Microwave and Electric Hybrid Sintering Process of AZO Target
Table 3
Resistivities of AZO targets.
| | Sample | Microwave starting temperature (°C) | Resistivity (Ω·cm) |
| | 1 | 1000 | 7.2 × 10−2 | | 2 | 1100 | 5.1 × 10−2 | | 3 | 1200 | 2.8 × 10−3 | | 4 | 1300 | 5.3 × 10−3 |
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