532351.fig.002a
(a)
532351.fig.002b
(b)
Figure 2: (a) Schematic of the self-aligned scheme for emitter groove metallization after blanket Al evaporation (the SiN layer is not displayed); (b) FIB image of an emitter groove after completed self-aligned emitter groove metallization. The inset on the bottom right is a close-up of the contact region between the evaporated Al layer and the poly-Si film.