Advances in Evaporated Solid-Phase-Crystallized Poly-Si Thin-Film Solar Cells on Glass (EVA)
Figure 5
(a) Schematic (top view) of
a fully metallized EVA solar cell where the grey areas correspond to plasma-etched
regions within which the emitter electrode (black) is located. (b) Transmission
microscopic image of an emitter groove after plasma etching. (c) Cross-sectional
schematic of the region indicated in (a).