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Advances in OptoElectronics
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Advances in OptoElectronics
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2009
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Article
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Fig 6
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Research Article
Tensorial Model for Photolithography Aerial Image Simulation
Figure 6
Comparison between LRTA and SOCS.
(a)
Comparison of LRTA and SOCS reconstruction error
(b)
Comparison between SOCS and LRTA runtime