Table 1: Base wafer epitaxial structure (LM: lattice matched).

#StepThickness (nm)DopingNotes

0n+-doped InP substraten+ 1e19
1InP buffer500UID
2Q1.1115UIDLM
3Q1.2115UIDLM
4Q1.3122UIDLM
5InP ES15UID
6Q1.3105UIDLM
7InP ES15UID
8Active (4QWs)85UIDbulk (<150), 6QW
9InP clad600Graded Zn+ to 1e18
10Q1.3 cap20UIDLM
11InP cap20UID