907560.fig.007a
(a)
907560.fig.007b
(b)
907560.fig.007c
(c)
Figure 7: Image of surface (a) and the surface relief (b) (Interference Microscope “Talysurf”); results obtained by layer-by-layer SIMS analysis (c) of the low temperature AlN layer on fianite substrate (TOF SIMS-5).