Development of Silicon Photonics Devices Using Microelectronic Tools for the Integration on Top of a CMOS Wafer

<table>Cross-cut of a CMOS
 wafer with metal levels and a bonded photonic layer with rib waveguides and
 rectangular cavities filled with germanium.</table>

Advances in Optical Technologies

fig14

Figure 14

Figure 14: Development of Silicon Photonics Devices Using Microelectronic Tools for the Integration on Top of a CMOS Wafer 