Development of Silicon Photonics Devices Using Microelectronic Tools for the Integration on Top of a CMOS Wafer

<table>T-splitter for rib waveguides: 3D-FDTD calculation of the field amplitude and
 SEM view after removal of the silicon oxide.
						</table>

Advances in Optical Technologies

Figure 3: Development of Silicon Photonics Devices Using Microelectronic Tools for the Integration on Top of a CMOS Wafer 