Developments in Gigascale Silicon Optical Modulators Using Free Carrier Dispersion Mechanisms
Figure 5
Cross-section of
the PN-diode-based silicon optical modulator.
(a) Schematic of the device. The optical waveguide has dimensions of
0.6 μm × 0.6 μm. The coplanar waveguide electrode has a signal
metal width of 6 μm and signal-ground metal separation of 3 μm
(b) SEM of the rib area showing the metal contact on the n-type
silicon cap
