Stress Induced Effects for Advanced Polarization Control in Silicon Photonics Components
Figure 2
(a) Calculated modal
birefringence for waveguides with = 2.2 m.
(a) in ridge waveguides with
vertical sidewalls () as a function of etch depth .
Waveguide width = 1.6 and 2.5 m, cladding thickness m,
and film stress = −100 MPa. (b) in vertical (θ = ) and trapezoidal (θ = ) waveguides as a function of the ridge top
width , for = 1.5 m, m, and = −300 MPa. The dashed curves show the
geometrical birefringence (i.e., in the absence of stress),
the solid curves show including both the geometrical
and stress-induced components.
