Cross-Shaped Terahertz Metal Mesh Filters: Historical Review and Results

Figure 4

Electron microscopy images illustrating the structural results for different fabrication process: (a) laser ablation-free standing [8]; (b) laser ablation-on a support material standing [8]; (c) DEBL [9]; (d) Nanoimprint [9]; (e) X-ray photolithography [10]; (f) UV photolithography [11].

(a)

(b)

(c)

(d)

(e)

(f)