(a) SEM image (top view) of the binary axicon of period 4 μm, produced with a scanning electron microscope Supra-25 with 1000x magnification. (b) Top view of the binary axicon with period 8 μm, produced with an atomic force microscope Solver Pro. An oblique image of (c) the peripheral fragment of the binary axicon with period 6 μm and (d) the central part of the binary axicon of period 8 μm, produced with the Solver Pro microscope.