Fabrication and Evaluation of Large Area Mo/Si Soft X-Ray Multilayer Mirrors at Indus SR Facilities
Figure 10
Measured and fitted soft X-ray reflectivity (angle scan) profile of Mo/Si ML (sample no. ML-3) at the wavelength λ = 127 Å using synchrotron radiation. Inset shows wavelength versus reflectivity curve measured at angle of incidence of 72.5°.