Fabrication and Evaluation of Large Area Mo/Si Soft X-Ray Multilayer Mirrors at Indus SR Facilities

<table>Measured and fitted of soft X-ray reflectivity profile of Mo/Si ML (sample no. ML-4) at the wavelength <i>λ</i> = 130 Å using synchrotron radiation. Inset shows wavelength versus reflectivity curve measured at angle of incidence 45°.</table>

Advances in Optical Technologies

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Figure 11

Figure 11: Fabrication and Evaluation of Large Area Mo/Si Soft X-Ray Multilayer Mirrors at Indus SR Facilities 