Table 1: Mo film quality interms of thickness (), roughness () and density (), as a function of argon pressure obtained from the best-fit XRR results of Figure 1.

Film (mbar) (Å) (Å) (gm/cc) Mo-1 4.0 10−3 87.5 4 7.07 Mo-2 4.0 10−3 116 4.5 10.06 Mo-3 4.0 10−3 180 6 10.1 Mo-4 3 10−3 155 3 10.2 M0-5 5 10−3 160 6.5 9.79 Mo-6 8 10−3 175 8 8.86