Table 1: Mo film quality interms of thickness ( ), roughness ( ) and density ( ), as a function of argon pressure obtained from the best-fit XRR results of Figure 1.

Film
(mbar)(Å)(Å)(gm/cc)

Mo-14.0 10−387.547.07
Mo-24.0 10−31164.510.06
Mo-34.0 10−3180610.1
Mo-43 10−3155310.2
M0-55 10−31606.59.79
Mo-68 10−317588.86