Table 2: Thickness and roughness of the various layers of Mo/Si MLs deduced from the fit of XRR results of Figures 2 and 3. IL1stands for interlayer at the Mo-on-Si interface, IL2 stands for interlayer at the Si-on-Mo interface. is the unit decrement of real part of the refractive index.

SampleTotal thickness (Å)Mo thickness (Å)δMo ( 10−6) Mo roughness (Å)
IL1 thickness (Å) δIL1 ( 10−6) IL1 roughness (Å)
Si thickness (Å) δSi ( 10−6) Si roughness (Å)
IL2 thickness (Å) δIL2 ( 10−6) IL2 roughness (Å)

ML-190.328.026.04.7
8.99.53
47.46.044
6.022.82

ML-266.016.726.04.7
8.09.543
35.06.04
6.323.82

ML-36821.028.05
9.09.54
31.07.64
7.018.52

ML-493.430.428.025
10.06.554
44.58.04
8.514.53